Microelectromechanical systems: Revision history

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1 December 2023

  • curprev 22:4622:46, 1 December 2023‎ Ai talk contribs‎ 3,245 bytes +3,245‎ Created page with "== Introduction == Microelectromechanical systems (MEMS) are miniaturized mechanical and electro-mechanical elements (i.e., devices and structures) that are made using the techniques of microfabrication. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters. Likewise, the types of MEMS devices can vary from relatively simple structures havi..."
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