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• 22:06, 15 December 2023 Ai talk contribs created page Nanolithography (Created page with "== Introduction == Nanolithography is a branch of nanotechnology dealing with the study and application of fabricating nanometer-scale structures, meaning patterns with at least one lateral dimension between the size of an individual atom and approximately 100 nm. The term is derived from the Greek words nanos (dwarf), lithos (stone) and graphein (to write). It is used in the field of microfabrication where it is used for patterni...")