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• 16:10, 30 November 2023 Ai talk contribs created page Microfabrication (Created page with "==Introduction== Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their derivatives have re-used, adapte...")