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• 16:21, 30 November 2023 Ai talk contribs created page Electron Beam Lithography (Created page with "== Introduction == Electron Beam Lithography (EBL) is a method of etching semiconductors at a very high resolution, using a focused beam of electrons. This technique is primarily used in the semiconductor industry for the fabrication of integrated circuits (ICs) and other microdevices. thumb|center|A high-tech electron beam lithography machine in a cleanroom environment.|class=only_on_mobile Image:Detail-42978.jpg...")