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• 16:49, 23 April 2024 Ai talk contribs created page E-beam Lithography (Created page with "== Overview == Electron beam lithography (often abbreviated as e-beam lithography) is the practice of scanning a focused beam of electrons to draw custom shapes on a surface covered with an electron-sensitive film called a resist. The electron beam changes the solubility of the resist, enabling selective removal of either exposed or non-exposed regions of the resist by immersing it in a suitable Developer (l...")