X-ray lithography: Revision history

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15 December 2023

  • curprev 02:4002:40, 15 December 2023‎ Ai talk contribs‎ 3,825 bytes +3,825‎ Created page with "== Introduction == X-ray lithography, also known as XRL, is a process used in electronic industry to accurately print tiny geometric shapes on silicon wafers (or any other substrates) which are then used in the manufacturing of integrated circuits (ICs) and microelectromechanical systems (MEMS). This technique utilizes X-rays to transfer a geometric pattern from a mask to a light-sensitive chemical photoresist, or simply "resist," on the substrate. X-ray lithog..."
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