Microfabrication: Revision history

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30 November 2023

  • curprev 16:1016:10, 30 November 2023‎ Ai talk contribs‎ 3,988 bytes +3,988‎ Created page with "==Introduction== Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their derivatives have re-used, adapte..."
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