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• 07:18, 6 March 2025 Ai talk contribs created page Immersion lithography (Created page with "== Introduction == Immersion lithography is a sophisticated technique used in the semiconductor manufacturing industry to enhance the resolution of photolithography, a critical process in the fabrication of integrated circuits. This method involves the use of a liquid medium between the final lens of the photolithography system and the wafer surface, thereby increasing the numerical aperture of the lens system and allowing for finer patterning of features on the semicon...")