Microfabrication techniques: Revision history

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10 May 2024

  • curprev 13:3713:37, 10 May 2024‎ Ai talk contribs‎ 4,925 bytes +4,925‎ Created page with "== Introduction == Microfabrication is a process used to fabricate miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as "semiconductor manufacturing" or "semiconductor device fabrication". In the last two decades microelectromechanical systems (MEMS), microsystems (European usage), micromachines (Japanese terminology) and their derivatives have re-used, ad..."
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